Overview
Photolithography is the central process in chip manufacturing. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical 'photoresist' on the wafer substrate.
Key Technologies
- Deep Ultraviolet (DUV): Uses light with wavelengths of 193nm.
- Extreme Ultraviolet (EUV): Uses much shorter wavelengths (13.5nm) to create smaller, more dense circuit patterns.
- Immersion Lithography: Uses a liquid medium between the lens and the wafer to increase resolution.
Significance
The precision of photolithography determines the minimum feature size (node) of a processor, directly impacting performance and power efficiency.